|Batch sizes||150 mm: 1|
List or range of wafer diameters the tool can accept
Types of wafers this equipment can accept
|1-flat, 2-flat, notched, no-flat|
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon on insulator, silicon|
List or range of wafer thicknesses the tool can accept
|300 .. 700 µm|