GCA 8500 DSW I-Line 5x Stepper

Alternate Name GCA Stepper
Manufacturer GCA
Model 8500 DSW
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 25, 150 mm: 25
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
150 mm
Wafer geometry
Types of wafers this equipment can accept
Wafer holder
Device that holds the wafers during processing.
vacuum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
450 .. 700 µm