STS ASE DRIE
|Batch sizes||100 mm: 1, 150 mm: 1|
List or range of wafer diameters the tool can accept
|150 mm, 100 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, notched, no-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
List or range of wafer thicknesses the tool can accept
|250 .. 1000 µm|