Plasmalab MicroEtch

Alternate Name Plasmalab
Manufacturer
Model MicroEtch
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1, 200 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
0 .. 200 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched, no-flat
Wafer holder
Device that holds the wafers during processing.
aluminum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon carbide, silicon, gallium arsenide
Wafer thickness
List or range of wafer thicknesses the tool can accept
0 .. 1000 µm