ASML 5500/950B 193 nm Stepper |
|
|---|---|
| Model | 5500/950B |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 150 mm: 6 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
150 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon on insulator, silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
550 .. 700 µm |
