Model AOE
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 75 mm: 1
Wafer diameter(s)
List or range of wafer diameters the tool can accept
75 mm, 100 mm
Wafer holder
Device that holds the wafers during processing.
conductive platen
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon carbide