Advanced RIE etcher

Model
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat
Wafer holder
Device that holds the wafers during processing.
alumina
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
quartz (fused silica), silicon carbide, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
100 .. 600 µm