ADT7134

Model 7134
Type commercial
Equipment Characteristics
Batch sizes 50 .. 300 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
50 .. 300 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched, no-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon on insulator, fused silica, gallium arsenide, quartz (fused silica), silicon, Borofloat (Schott), glass (Hoya)
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 2000 µm