LIGA stands for X-ray LIthography, Electroforming (German:
Galvanoformung), and molding (German: Abformung). This technology
allows us to define high aspect ratio structures in nickel. The
process consists of exposing a sheet of PMMA bonded to a wafer
using X-ray lithography. The PMMA is then developed and the
exposed material is removed. Nickel is then electroplated up in
the open areas of the PMMA. The nickel over-plate is removed by
polishing, leaving high aspect ratio nickel parts. The PMMA is
removed, and the nickel parts may remain anchored to the substrate
or be released.
more