Process Hierarchy

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  AES (Auger-electron spectroscopy)
Process characteristics:
Materials
Material(s) to inspect.
Materials
Available  
Selected
Material(s) to inspect.
Thickness
Thickness of material(s) layer to inspect.
Thickness
Thickness of material(s) layer to inspect.
unconstrained
Sides inspected
The sides of the wafer inspected by the process
either
Equipment