Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  E-beam lithography
Process characteristics:
Min feature size
Dimension of smallest feature to be resolved in the lithography.
Min feature size
Dimension of smallest feature to be resolved in the lithography.
unconstrained
Sides processed either
Equipment