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How to Start
About MEMS
Spin/rinse/dry: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at
engineering@mems-exchange.org
or call us at (703) 262-5368
Spin/rinse/dry
Process characteristics:
Rinsing agent
Specify preferred rinsing agent (if known).
Rinsing agent
acetone
isopropyl alcohol
methanol
other
steam
water
Specify preferred rinsing agent (if known).
Temperature
Preferred rinsing temperature (if known).
Temperature
°C
Preferred rinsing temperature (if known).
unconstrained
Sides processed
both
Equipment