Process Hierarchy

  Pattern Generation - Chrome - 1x
Feature geometry
Shape of feature with dimensions characterized by the minimum feature size
equal line space
Magnification 1
Max aperture size
Size of pattern generator's maximum aperture (e.g., 1 mm)
950.0 um
Max flash count
Maximum number of flashes allowed per mask.
Min aperture size
Size of pattern generator's minimum aperture (e.g., 2 um)
2.0 um
Min feature size 2 µm
Equipment GCA 3600F PG
Equipment characteristics:
File formats
List of CAD file formats supported (eg. GDSII, CIF)
Mask coatings
Mask coating materials (eg. chrome).
chromium, emulsion
Mask plate dimensions
Width, length, thickness of the mask plates (eg. 5x7x0.09 inch).
5x5x.09 inch, 7x7x.09 inch
Mask polarity
Polarity of the mask.
Max field size 150 mm
  • Mask making available ONLY when combined with additional UCB fab processes.
  • Mask coating : Chrome only.
  • Mask polarity: Darkfield only.
  • Maximum allowable number of flashes per mask plate: 100000.