Process Hierarchy

  Spectroscopic Ellipsometric Single Point Film Thickness Measurement
Materials aluminum nitride, PZT, silicon dioxide on silicon, silicon nitride on silicon
Refractive index 1 .. 4
Thickness 0.01 .. 2 µm
Wafer size
Wafer size
Equipment Woollam Spectroscopic Ellipsometer
Equipment characteristics:
Batch sizes 50 .. 150 mm: 1
Piece dimension
Range of wafer piece dimensions the equipment can accept
50 .. 150 mm
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular
Piece thickness
Range of wafer piece thickness the equipment can accept
200 .. 700 µm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, silicon on insulator