Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Organic clean
Process characteristics:
Etchant
Specify preferred cleaning agent/etchant (if known).
Etchant
Specify preferred cleaning agent/etchant (if known).
Process duration
Specify preferred cleaning time (if known).
Process duration
Specify preferred cleaning time (if known).
unconstrained
Temperature
Preferred cleaning temperature (if known).
Temperature
Preferred cleaning temperature (if known).
unconstrained
Sides processed both
Equipment
Comments:
  • Specific processes to remove organic contamination on substrates.