Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Lapping
Process characteristics:
Roughness
Required RMS roughness of the lapped/polished surface (if known).
Roughness
Required RMS roughness of the lapped/polished surface (if known).
unconstrained
Thickness removed
Thickness of material to be removed from substrate.
Thickness removed
Thickness of material to be removed from substrate.
unconstrained
Sides processed either
Equipment