Process Hierarchy

  Pattern generation
Process characteristics:
Defect density
Density (by area) of defects of a given size (e.g., 1dpsi@1.0um) if known.
Defect density
Density (by area) of defects of a given size (e.g., 1dpsi@1.0um) if known.
Magnification
Magnification factor of layout file to image on mask.
Magnification
Magnification factor of layout file to image on mask.
unconstrained
Mask coating material
Select preferred mask coating material (if known).
Mask coating material
Select preferred mask coating material (if known).
Mask plate dimensions
Overall length/width/thickness of mask (ie. 5x5x0.09").
Mask plate dimensions
Overall length/width/thickness of mask (ie. 5x5x0.09").
Material
Select preferred mask material (if known).
Material
Select preferred mask material (if known).
Min feature size
Dimension of smallest feature to be realized on mask.
Min feature size
Dimension of smallest feature to be realized on mask.
unconstrained
Equipment