Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Ashing
Process characteristics:
Depth
Thickness of material to be removed.
Depth
Thickness of material to be removed.
unconstrained
Etching source gases
Specify preferred source gases for the etch process (if known).
Etching source gases
Available  
Selected
Specify preferred source gases for the etch process (if known).
Material
Material to be etched.
Material
Material to be etched.
Sides processed either
Equipment