Process Hierarchy

on front
  Microscope inspection
Batch size 1
Magnifications 5, 10, 20, 50, 100
Sides inspected
The sides of the wafer inspected by the process
Wafer size
Wafer size
Equipment Leitz Ergolux
Equipment characteristics:
Wafer holder
Device that holds the wafers during processing.
glass plate
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 5000 µm
  • Knowledge of whether a filter must be used or not.