Process Hierarchy

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  SEM analysis
Process characteristics:
Material(s) to inspect.
Material(s) to inspect.
Excluded materials gold (category), copper
Sides inspected
The sides of the wafer inspected by the process
Equipment Hitachi S-4500 SEM
  • This SEM is a field emission electron microscope with two secondary electron detectors, a back scatter detector, and an infrared chamber scope. In addition, it has a Noran energy dispersive x-ray detection system for elemental analysis. The microscope is capable of operating at a spatial resolution of 15 angstroms at 15kV energy.
Equipment characteristics:
MOS clean no
Piece dimension
Range of wafer piece dimensions the equipment can accept
1 .. 25 mm
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular, triangular shard
Piece thickness
Range of wafer piece thickness the equipment can accept
0 .. 1 cm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium
Extra terms