Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  X-ray mask making
Process characteristics:
Gold thickness
Gold thickness*
Thickness removed
Amount of material removed
 0 .. 0.5 µm
Comments:
  • Used for LIGA processes.
  • After fabrication the mask is
    tested in the X-ray beam line.
  • Pricing available upon request.