Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Pre-furnace clean
  1 RCA clean
  2 HF dip
Batch size 25
Wafer size
Wafer size
Comments:
  • This is the standard pre-furnace (deposition and oxidation) clean at Michigan.