Process Hierarchy

  Aluminum wirebonding
Process characteristics:
Number of bond wires
Number of wires to be bonded.
Number of bond wires*
Number of wires to be bonded., must be 1 .. 1000
1 .. 1000
Batch size 1
Die dimension
Characteristic dimension of dies (e.g., side length of square) the equipment can accept
50 .. 100000 µm
Min bond pad size
Minimum characteristic dimension of bond pad.
50 µm
Min bond pad spacing
Minimum spacing between bond pads.
50 µm
Wire material
Wire material
aluminum
Equipment Orthodyne aluminum wirebonder
  • Wire diameter 5, 8 and 20 mil aluminum wire
Equipment characteristics:
MOS clean no
Piece dimension
Range of wafer piece dimensions the equipment can accept
10 .. 100 mm
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular, triangular shard
Piece thickness
Range of wafer piece thickness the equipment can accept
200 .. 1000 µm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, polyethylene, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator