SOG_design_rules_v2_03-19-07.pdf (799.2 KB, application/pdf)- attached by ozgur (Mehmet Ozgur) on 2007-04-23 14:14
- Revised design rules
![[Thumbnail]](file/b61c4309f434/thumbnail?50) sog_lr.jpg (165.7 KB, image/jpeg)- attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
- SOG-MEMS process flow
![[Thumbnail]](file/a74d8d305185/thumbnail?50) sog3.png (591.0 KB, image/png)- attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
- 3D view of a SOF-MEMS device
![[Thumbnail]](file/b2b723468186/thumbnail?50) sog2.png (61.5 KB, image/png)- attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
- SEM image of SOG-MEMS devices
![[Thumbnail]](file/5789ee7d1145/thumbnail?50) sog1.png (79.3 KB, image/png)- attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
- Description of SOG-MEMS device
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