Process Hierarchy

  Nitrogen anneal
Process characteristics:
Process duration
Running time of the process (excluding setup/shutdown time)
Process duration
Running time of the process (excluding setup/shutdown time), must be 0 .. 4 hour
0 .. 4 hour
Temperature
Maximum temperature the substrate reaches during a process
Temperature*
Maximum temperature the substrate reaches during a process, must be 750 .. 1100 °C
750 .. 1100 °C
Ambient
Ambient to which substrate is exposed during processing
nitrogen
Excluded materials gold
Setup time 60 min
Sides processed both
Wafer size
Wafer size
Equipment Tylan/Tystar Furnaces
Equipment characteristics:
Batch sizes 100 mm: 24, 150 mm: 24
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 700 µm