Process Hierarchy

  Low-stress silicon nitride LPCVD (<50 MPa)
Process characteristics:
Amount of material added to a wafer
Amount of material added to a wafer, must be 0 .. 2 µm
0 .. 2 µm
Batch sizes 100 mm: 24
Deposition rate
Rate at which material is added to a wafer
40 Å/min
Excluded materials gold
Material silicon nitride
Measured film thickness variation (+/- %) 14.9
Refractive index 2.1 .. 2.3
Residual stress 0 .. 50 MPa
Setup time 60 min
Sides processed both
Temperature 835 °C
Wafer size
Wafer size
Equipment Tylan/Tystar Furnaces (low-stress silicon nitride tube)
Equipment characteristics:
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 600 µm
  • DCS/NH3 ratio is X:1.
  • This recipe is available for 4" wafers only.