Process Hierarchy

Process
Sputter deposition (CVC)
Sputter deposition (Varian)
Aluminum DC-magnetron sputtering (high power)
Aluminum DC-magnetron sputtering (low power)
Aluminum/silicon/copper DC-magnetron sputtering (high power)
Aluminum/silicon/copper DC-magnetron sputtering (low power)
Chromium DC-magnetron sputtering (high power)
Chromium DC-magnetron sputtering (low power)
Nickel DC-magnetron sputtering (high power)
Nickel DC-magnetron sputtering (low power)
Nickel/chromium DC-magnetron sputtering (high power)
Nickel/chromium DC-magnetron sputtering (low power)
Titanium/nickel DC-magnetron sputtering
Sputtered Metal Film
Al/2% Si DC-magnetron sputtering
Titanium DC-magnetron sputtering
Tungsten DC-magnetron sputtering
Zinc oxide (ZnO) RF-magnetron sputtering
Aluminum Zinc Oxide (AZO) deposition
Indium Tin Oxide (ITO) deposition
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