Process Hierarchy

Process
Niobium Titanium Oxide (NTO) deposition
Al sputtering (Metron)
Aluminum Nitride (AlN) Sputter Deposition
Copper DC sputtering
Nickel DC sputtering
Titanium DC sputtering
Aluminum DC-magnetron sputtering (high power)
Aluminum DC-magnetron sputtering (low power)
Aluminum/silicon/copper DC-magnetron sputtering (high power)
Aluminum/silicon/copper DC-magnetron sputtering (low power)
Chromium DC-magnetron sputtering (high power)
Chromium DC-magnetron sputtering (low power)
Indium Tin Oxide (ITO) DC-magnetron sputtering
Nichrome DC-magnetron sputtering (high power)
Nichrome DC-magnetron sputtering (low power)
Nickel DC-magnetron sputtering (high power)
Nickel DC-magnetron sputtering (low power)
Palladium DC-magnetron sputtering
Platinum DC-magnetron sputtering (high power)
Platinum DC-magnetron sputtering (low power)
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