|
Wafer size |
|
Equipment |
Karl Suss BA6 |
Equipment characteristics: |
Batch sizes |
100 mm: 2, 150 mm: 2 |
MOS clean |
no |
Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
Wafer holder Device that holds the wafers during processing. |
stainless steel |
Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, Pyrex (Corning 7740) |