Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Development #1 - LaNiO3 (LNO) Deposition Down
Batch size 8
Material LaNiO3 (LNO)
Thickness 0 .. 0.2 µm
Comments:
  • Module/Task 1 - Developing LNO Process
    o 8 wafers
    o 0.1 um Thermal Oxide coating
    o Spin customer supplied Sol-gel coating for LNO
    o Hot plate bake DOE
    o RTA DOE
    o Thickness and XRD measurements
    o Report