Process Hierarchy

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  Development #2 - PZT on LaNiO3 (LNO) Down
Batch size 8
Material PZT
Thickness 0 .. 1 µm
Comments:
  • Module/Task 2 - Developing PZT on LNO Process
    o 8 wafers
    o 0.1 um Thermal Oxide coating
    o Spin customer supplied Sol-gel coating for LNO
    o Hot plate bake
    o RTA
    o Spin customer supplied Sol-gel coating for PZT
    o Hot plate bake
    o RTA DOE
    o Thickness, XRD, and ferroelectric measurements
    o Report