Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  PZT on LaNiO3 (LNO) Deposition
Batch size 4
Material PZT
Thickness 0 .. 1 µm
Comments:
  • Module/Task 3 - PZT on LNO
    o 4 wafers
    o 0.1 um Thermal Oxide coating
    o Spin customer supplied Sol-gel coating for LNO
    o Hot plate bake
    o RTA
    o Spin customer supplied Sol-gel coating for PZT
    o Hot plate bake
    o RTA
    o Thickness measurements