Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  E-Beam Resist Coat
Process characteristics:
Material
Material
Thickness
Thickness of film to be deposited.
Thickness*
Thickness of film to be deposited., must be 0.1 .. 1 µm
0.1 .. 1 µm
Batch size 1
Sides processed either
Equipment