Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  PZT Development module
Batch size 3
Material PZT
Thickness 0 .. 1 µm
Wafer diameter(s)
List or range of wafer diameters the tool can accept
 100 mm
Wafer size
Wafer size
Comments:
  • PZT actuator stack deposition and patterning on customer supplied wafers.