Process Hierarchy

  Oxidation
Process characteristics:
Material
Oxide material to be grown.
Material
Oxide material to be grown.
Temperature
Specify preferred oxidation temperature (if known).
Temperature
Specify preferred oxidation temperature (if known).
unconstrained
Thickness
Thickness of oxide to be grown.
Thickness
Thickness of oxide to be grown.
unconstrained
Ambient
Ambient to which substrate is exposed during processing
nitrogen, oxygen, steam
Sides processed both
Equipment