Process Hierarchy

  Dehydration bake
Pressure of process chamber during processing
1 atm
Sides processed both
Temperature 110 °C
Thermal duration 15 min
Wafer size
Wafer size
Equipment Lindberg/Blue M mechanical oven
Equipment characteristics:
Batch sizes 25 .. 150 mm: 24
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, glass (category)
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm