Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Dry oxidation
Process characteristics:
Material
Oxide material to be grown.
Material
Oxide material to be grown.
Temperature
Specify preferred oxidation temperature (if known).
Temperature
Specify preferred oxidation temperature (if known).
unconstrained
Thickness
Thickness of grown oxide.
Thickness
Thickness of grown oxide.
unconstrained
Ambient
Ambient to which substrate is exposed during processing
 nitrogen, oxygen
Sides processed both
Equipment