Deposition: Page 15 of 17

Process Hierarchy

• Bonding
• Clean
• Consulting
• Deposition
• Evaporation
• LPCVD
• Low-stress SiN deposition
• Miscellaneous deposition
• Oxidation
• PECVD
• Spin casting
• Sputtering
• Doping
• Etch
• LIGA
• Lift off
• Lithography
• Mask making
• Metrology
• Miscellaneous
• Packaging
• Polishing
• Process technologies
• Thermal
• Unique capabilities