MNX Services

E-Beam Services

The MNX offers advanced e-beam lithographic services to its customers. This service is offered at affordable hourly rates, and provides quicker turn-around via a recently installed state-of-the-art e-beam tool. Key benefits of this service include:

  • performed on a brand new state-of-the-art e-beam system (Vistec EBPG 5000+ upgraded to accelerate throughput in tool);
  • fast scan rate - 50MHz scan speed = high throughput and lower cost;
  • spot size below 2.5 nm; large scan field size;
  • field stitching and alignment accuracy below 30 nm;
    10-wafer holder load lock (reduces pump down times);
  • fast cycle times;
  • service performed by e-beam experts;
  • variety of resist types are available;
  • inexpensive hourly rates for MNX customers.
For more information and to discuss your e-beam service needs, contact MNX at or call us at 703-262-5368 as ask to speak with an engineer.