| Advanced silicon dioxide etch (AOE) with photolithography |
| Silicon DRIE with photolithography (Unaxis VLR 700) |
| Silicon DRIE with photolithography (PlasmaTherm 770) |
| Aluminum (1% silicon) plasma etch |
| Aluminum plasma etch |
| Deep RIE (Bosch process) |
| Deep RIE (Bosch process) with photolithography |
| Silicon dioxide plasma etch (anisotropic) |
| Silicon dioxide plasma etch (anisotropic, MOS clean) |
| Titanium plasma etch |
| Titanium/tungsten plasma etch |
| Tungsten plasma etch |
| Aluminum plasma etch |
| Polysilicon RIE |
| Silicon DRIE |
| Silicon DRIE with anti-footing SOI |
| Silicon dioxide plasma etch |
| Silicon nitride plasma etch |
| Silicon DRIE |
| Ion Milling |
