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Deposition: Page 2 of 17
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Evaporation
LPCVD
Low-stress SiN deposition
Miscellaneous deposition
Oxidation
PECVD
Spin casting
Sputtering
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
Aluminum DC-magnetron sputtering (low power)
Aluminum/silicon/copper DC-magnetron sputtering (high power)
Aluminum/silicon/copper DC-magnetron sputtering (low power)
Chromium DC-magnetron sputtering (high power)
Chromium DC-magnetron sputtering (low power)
Dry oxidation
LTO LPCVD
Multipoly Recipe #1
Multipoly Recipe #2
Nickel DC-magnetron sputtering (high power)
Nickel DC-magnetron sputtering (low power)
Nickel/chromium DC-magnetron sputtering (high power)
Nickel/chromium DC-magnetron sputtering (low power)
P-doped polysilicon LPCVD
PSG LPCVD
Photoresist coat with softbake (AZ 9260)
Photoresist coat with softbake (Shipley 1813)
Silicon nitride LPCVD
Titanium/nickel DC-magnetron sputtering
Undoped polysilicon LPCVD
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