| Al sputtering (Metron) |
| Aluminum Nitride (AlN) Sputter Deposition |
| Cool grease bonding |
| Dry oxidation |
| Evaporation (Evatek -Batch dome) |
| Photoresist Spin Coat ACS200 (AZ 9245) |
| Photoresist Spray Coat |
| Protective coating for KOH etch (ProTEK) |
| Silicon Dioxide PECVD PlasmaTherm 790+ |
| Silicon Nitride PECVD PlasmaTherm 790+ |
| Silicon dioxide VLR700 PECVD |
| Silicon nitride PECVD (Unaxis VLR 700) |
| Spin casting (Durimide 7520) |
| Spin casting (Durimide) |
| Spin casting Programmable Spinner |
| Wet oxidation |
| Chromium E-beam evaporation |
| Copper DC sputtering |
| Copper E-beam evaporation |
| Copper electroplating |
