Gold wet etch |
HF 10:1 Batch Etch |
HF Vapor Phase Etch |
HF etch (10:1) Single Wafer |
Nickel/Copper wet etch |
Photoresist Descum (Ion 40) |
Photoresist Strip (Plasmalab) |
Photoresist Stripping (Ion 40) |
Photoresist wet strip (PRS 3000) |
Photoresist wet strip (acetone) |
Polymer O2 ICP Etch |
Silicon Carbide ICP Etch |
Silicon DRIE (Bosch Process) |
Silicon DRIE (Bosch Process) Plasma Therm 770 |
Silicon DRIE - No Lag (Etch rate independent of feature size) |
Silicon Dioxide ICP Etch |
Silicon ICP Etch |
Silicon Nitride ICP Etch |
Silicon dioxide ISM High Density etch |
Silicon dioxide RIE (Plasmalab) |