| De-mounting handle wafer |
| KOH etch |
| Photoresist ashing |
| Pocket wafer |
| Poly-Ge RIE |
| Poly-SiGe RIE |
| Polysilicon wet etch |
| Resist strip |
| Silicon DRIE with anti-footing SOI option |
| TMAH silicon etch |
| Xenon difluoride (XeF2) Isotropic Si etch |
| Advanced oxide etch |
| Deep oxide etch - High aspect ratio |
| Deep oxide etch - Microlens recipe |
| Deep oxide etch - Standard recipe |
| Deep oxide etch - Ultra smooth sidewall |
| Aluminum etch |
| Buffered oxide etch |
| Chromium wet etch |
| De-mounting handle wafer |
