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Advantages
Capabilities
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How to Start
About MEMS
Metrology: Page 2 of 6
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Electrical metrology
Geometric metrology
Miscellaneous metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
Spectroscopic ellipsometry film thickness measurement
Stylus profilometer step measurement
Wafer curvature measurement
Wafer curvature measurement with stress calculation
Ellipsometric Film Thickness Measurement
Linewidth metrology
SEM analysis
Sheet resistance measurement
Spectrophotometric film thickness measurement
Spectrophotometric film thickness measurement
Stylus profilometer step measurement
Spectrophotometric film thickness measurement
Stylus profilometer 1-D step measurement
AFM (Atomic force microscopy)
EDX material analysis
Focused Ion Beam
Optical Microscopy
Optical surface profilometry
SEM sample analysis
Stylus profilometer step measurement
Results Page:
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