| Nitrogen anneal |
| Dry oxidation (metal) |
| Dry oxidation (non-metal) |
| Nitrogen anneal |
| Wet oxidation (metal) |
| Wet oxidation (non-metal) |
| Dehydration bake |
| G-line BCB cure |
| G-line photoresist bake (AZ4000) |
| G-line photoresist hardbake (AZ4000) |
| Nitrogen anneal (non-MOS-clean) |
| Rapid thermal anneal (argon) |
| Rapid thermal anneal (hydrogen/nitrogen) |
| Rapid thermal anneal (nitrogen) |
| Rapid thermal anneal (oxygen) |
| Dry oxidation |
| Dry/wet/dry TCA oxidation |
| Dry/wet/dry oxidation |
| Nitrogen anneal |
| Photoresist hardbake (hotplate @105C) |
