Process Hierarchy

Process
Contact photolithography (SU-8)
Contact photolithography
G-Line BCB process
Contact G-line photolithography (front-back align, OCG 825 35CS)
Contact G-line photolithography (front-front align, OCG 825 35CS)
Contact I-line photolithography (front-back align, OiR 897 10i)
Contact I-line photolithography (front-front align, OiR 897 10i)
Contact I-line photolithography with back protected (front-back align, OiR 897 10i)
Contact I-line photolithography with back protected (front-front align, OiR 897 10i)
Contact photolithography (Shipley 220)
Contact I-line photolithography (AZ 5214 - MA6) -Image Reversal-
Contact I-line photolithography (AZ 5214 - MA6) -Standard-
Contact I-line photolithography (AZ 5214 - MJB3) -Image Reversal-
Contact I-line photolithography (AZ 5214 - MJB3) -Standard-
Contact I-line photolithography (Shipley 1818 - MA6)
Contact I-line photolithography (Shipley 1818 - MJB3)
Contact photolithography (Image reversal)
Contact photolithography (SU-8)
Contact photolithography (automated)
Contact photolithography (manual)
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