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How to Start
About MEMS
Etch: Page 9 of 10
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
Anisotropic etch
Deep RIE
Isotropic etch
Miscellaneous etch
Strip
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
EDP Etch
Gold etch
HF etch
Lift-off etch (1112A)
Lift-off etch (acetone)
Photoresist Strip
Photoresist ashing (non-clean -March)
Photoresist ashing (non-clean)
Polysilicon RIE (clean)
Polysilicon RIE (non-clean)
Silicon DRIE
Silicon Dioxide RIE (clean)
Silicon Dioxide RIE (non-clean)
Silicon Nitride RIE (clean)
Silicon Nitride RIE (non-clean)
Wafer thinning
Anisotropic dry etch
Anisotropic etch
Anisotropic plasma etch
Anisotropic wet etch
Results Page:
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