Process Hierarchy

Process
Phosphorus diffusion (POCl3)
Boron diffusion
POCl diffusion
Deep boron diffusion (Double-sided)
Deep boron diffusion (Single sided)
Deep boron diffusion
Deep boron diffusion with drive-in
Phosphorus diffusion with drive-in
Boron diffusion
Phosphorus diffusion (POCl3)
Boron diffusion and anneal
Phosphorus diffusion and anneal
Boron pre-diffusion
Phosphorus diffusion
Boron pre-deposition
Phosphorus pre-deposition
Diffusion