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About MEMS
Doping: Page 1 of 1
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Diffusion
Ion implantation
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
Phosphorus diffusion (POCl3)
Boron diffusion
POCl diffusion
Deep boron diffusion (Double-sided)
Deep boron diffusion (Single sided)
POCl3 diffusion
Deep boron diffusion
Deep boron diffusion with drive-in
Phosphorus diffusion with drive-in
Boron diffusion
Phosphorus diffusion (POCl3)
Boron diffusion and anneal
Phosphorus diffusion and anneal
Boron pre-diffusion
Phosphorus diffusion
POCl3 diffusion
Boron pre-deposition
Phosphorus pre-deposition
Diffusion
Ion implant
